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Handbook of Contamination Control in Microelectronics

Handbook of Contamination Control in Microelectronics

Handbook of Contamination Control in Microelectronics
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Handbook of Contamination Control in Microelectronics

by Tolliver, Donald L

  • Used
  • Fine
  • Hardcover
  • first
Condition
Fine/Fine
ISBN 10
0815511515
ISBN 13
9780815511519
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About This Item

Park Ridge, New Jersey: Noyes Publications, 1988. Comprehensive text covers basic and advanced topics in contamination control, including the more critical issues of process engineering and circuit manufacturing, and the fundamentals required for excellence in modern semiconductor manufacturing. What makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well-recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. This handbook defines and describes most of the major categories in current contamination control technology, including aerosol filtration and instrumentation technology; electrostatics in clean rooms; ultra high purity water; deionized water filtration technology; particles in ultrapure process gases; surface particle detection technology; wafer automation and transfer systems; monitoring systems for semiconductor fluids; etc. 488 pgs. Illustrated. Prior owner's name on front endpaper. Dustjacket in mylar. . First Edition. Hard Cover. Fine/Fine. 8vo - over 7¾" - 9¾" tall.

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Details

Bookseller
GlobalAcademics US (US)
Bookseller's Inventory #
EG-49
Title
Handbook of Contamination Control in Microelectronics
Author
Tolliver, Donald L
Format/Binding
Hardcover
Book Condition
Used - Fine
Jacket Condition
Fine
Edition
First Edition
ISBN 10
0815511515
ISBN 13
9780815511519
Publisher
Noyes Publications
Place of Publication
Park Ridge, New Jersey
Date Published
1988
Keywords
Engineering, Electronics, Semiconductors, Physics, Aerosols, Chemistry, Mathematics, Electrostatics, Instrumentation, Optics, HEPA, Ionization, Electrodynamics, Ultrafiltration, Hydrology, Gases, Thermodynamics, Lithography, Metallurgy, Statistics, Scienc
Bookseller catalogs
Engineering;

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GlobalAcademics

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