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Handbook of Contamination Control in Microelectronics: Principles, Applications
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology Hardcover - 1988 - 1st Edition

by Donald L. Tolliver


From the publisher

This book introduces contamination control in a comprehensive manner. It covers the basics for the beginner, and delves in depth into the more critical issues of process engineering and circuit manufacturing for the more advanced reader. The reader will begin to see how the puzzle of contamination control comes together and to focus on the fundamentals required for excellence in modern semiconductor manufacturing. What makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. This handbook defines and describes most of the major categories in current contamination control technology.

Details

  • Title Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology
  • Author Donald L. Tolliver
  • Binding Hardcover
  • Edition number 1st
  • Edition 1
  • Pages 509
  • Volumes 1
  • Language ENG
  • Publisher William Andrew, Park Ridge, New Jersey
  • Date 1988-12-31
  • Illustrated Yes
  • Features Bibliography, Glossary, Illustrated, Index
  • ISBN 9780815511519 / 0815511515
  • Weight 1.64 lbs (0.74 kg)
  • Dimensions 9.22 x 6.24 x 1.18 in (23.42 x 15.85 x 3.00 cm)
  • Library of Congress subjects Integrated circuits - Design and construction, Contamination (Technology)
  • Library of Congress Catalog Number 87031533
  • Dewey Decimal Code 621.381
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology...

Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology (Materials Science and Process Technology)

by Donald L. Tolliver

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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology...
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology (Materials Science and Process Technology Series)

by Donald L. Tolliver

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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology

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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology

by Tolliver, Donald L. (ed)

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Park Ridge, NJ: Noyes Publications, 1988. 2nd . Hardcover. Fine/Fine. 8vo - over 7¾" - 9¾" tall. 488pp.incl.index; HB blk.w/gilt; fine condition w/clean,tight pgs. DJ white w/red&blk.; fine condition. " ...covers the basics in most areas for the beginner, and it delves in depth into the more critical issues of process engineering and circuit manufacturing for the advanced reader." illus.
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology...
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology (Materials Science and Process Technology)

by Tolliver, Donald L

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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology

by Donald L. Tolliver

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Handbook of Contamination Control in Microelectronics
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Handbook of Contamination Control in Microelectronics

by Tolliver, Donald L

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Park Ridge, New Jersey: Noyes Publications, 1988. Comprehensive text covers basic and advanced topics in contamination control, including the more critical issues of process engineering and circuit manufacturing, and the fundamentals required for excellence in modern semiconductor manufacturing. What makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well-recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. This handbook defines and describes most of the major categories in current contamination control technology, including aerosol filtration and instrumentation technology; electrostatics in clean rooms; ultra high purity water; deionized water filtration technology; particles in ultrapure process gases; surface particle detection technology; wafer automation and transfer systems; monitoring systems for semiconductor… Read More
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology...
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Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology (Materials Science and Process Technology Series)

by Tolliver, Donald L

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ISBN 10 / ISBN 13
9780815511519 / 0815511515
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