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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles,
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications Paperback - 2014

by Rainer Behrisch (Editor); Contribution by R. Behrisch; Klaus Wittmaack (Editor)


From the publisher

Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.

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  • Title Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
  • Author Rainer Behrisch (Editor); Contribution by R. Behrisch; Klaus Wittmaack (Editor)
  • Binding Paperback
  • Pages 415
  • Volumes 1
  • Language ENG
  • Publisher Springer
  • Date 2014-08-23
  • ISBN 9783662311042 / 3662311046
  • Weight 1.34 lbs (0.61 kg)
  • Dimensions 9.21 x 6.14 x 0.89 in (23.39 x 15.60 x 2.26 cm)
  • Dewey Decimal Code 530.41
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications

by Rainer Behrisch

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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)

by Behrisch, R. (Contributor) / McClanahan, E.D. (Contributor) / Hofer, W.O. (Contributor) / Hauffe, W. (Contributor) / Laegreid, N. (Contributor) / Sundqvist, B.U.R. (Contributor) / Yu, M.L. (Contributor) / Wittmaack, K. (Contributor)

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Springer, 2014. Paperback. New. 436 pages. 9.30x6.20x1.10 inches.
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£59.39
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical...
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications

by Rainer Behrisch

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  • Paperback
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ISBN 10 / ISBN 13
9783662311042 / 3662311046
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Paperback / softback. New. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering.
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£59.47
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