Predictive Simulation of Semiconductor Processing: Status and Challenges Hardcover - 2004
by Jarek Dabrowski (Editor); Eicke R. Weber (Editor)
First line
The unprecedented success of the "silicon revolution" has demonstrated that a new microelectronic technology can be developed and the existing one optimized in a straightforward way: by experimenting with processing parameters during production.
From the rear cover
Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
Details
- Title Predictive Simulation of Semiconductor Processing: Status and Challenges
- Author Jarek Dabrowski (Editor); Eicke R. Weber (Editor)
- Binding Hardcover
- Edition 1st
- Pages 490
- Volumes 1
- Language ENG
- Publisher Springer
- Date 2004-05-05
- ISBN 9783540204817 / 3540204814
- Weight 2.35 lbs (1.07 kg)
- Dimensions 9.7 x 6.5 x 1.5 in (24.64 x 16.51 x 3.81 cm)
- Library of Congress subjects Microelectronics - Technological innovations, Semiconductors - Simulation methods
- Library of Congress Catalog Number 2004040690
- Dewey Decimal Code 621.381
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Predictive Simulation of Semiconductor Processing: Status and Challenges (Springer Series in Materials Science, 72)
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Predictive Simulation of Semiconductor Processing: Status and Challenges (Springer Series in Materials Science, 72)
by Dabrowski, Jarek [Editor]; Weber, Eicke R. [Editor];
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