Description:
Boston: Academic Press, 1992. Hardover, [xii], 476 pages. Near Fine condition. Size 9.25"x6.25". "Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods." Book has very light exterior shelfwear. Previous owner's name on front fly, else Fine condition, clean and unmarked.. Near Fine.
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Plasma Etching: An Introduction Hardcover - 1989 - 1st Edition
by Dennis M. Manos (Editor); Daniel L. Flamm (Editor)
First line
The rapid development of plasma etching technology was stimulated by its application to the manufacture of microelectronic devices.
Details
- Title Plasma Etching: An Introduction
- Author Dennis M. Manos (Editor); Daniel L. Flamm (Editor)
- Binding Hardcover
- Edition number 1st
- Edition 1
- Pages 476
- Volumes 1
- Language ENG
- Publisher Academic Press
- Date 1989-07-28
- Illustrated Yes
- Features Illustrated, Index, Table of Contents
- ISBN 9780124693708 / 0124693709
- Weight 2.12 lbs (0.96 kg)
- Dimensions 9.26 x 6.28 x 1.43 in (23.52 x 15.95 x 3.63 cm)
- Library of Congress subjects Plasma etching
- Library of Congress Catalog Number 87037419
- Dewey Decimal Code 621.044
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Plasma Etching: An Introduction
by Manos, Dennis M.; Flamm, Daniel L. (Editors)
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Plasma Etching: An Introduction
by Dennis M. Manos
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Hard Cover. New. New Book; Fast Shipping from UK; Not signed; Not First Edition; The Plasma Etching: An Introduction.
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Plasma Etching: An Introduction
by Dennis M. Manos
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Hardback. New. Plasma etching plays an essential role in microelectronic circuit manufacturing. Useful for researchers, process engineers, and students, this book introduces the physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. It offers practical examples of process chemistry, equipment design, and production methods.
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Plasma Etching: An Introduction (Plasma : Materials Interactions)
by Dennis Manos
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Plasma Etching : An Introduction
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Plasma Etching: An Introduction (Plasma -- Materials Interactions)
by Manos, Dennis M. [Editor]; Flamm, Daniel L. [Editor];
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- ISBN 13
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Academic Press. Hardcover. New. 9x6x1.
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Plasma Etching: An Introduction (Plasma -- Materials Interactions)
by Manos, Dennis M. [Editor]; Flamm, Daniel L. [Editor];
- New
- Hardcover
- Condition
- New
- Binding
- Hardcover
- ISBN 13
- 9780124693708
- ISBN 10
- 0124693709
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- 1
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San Diego, California, United States
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Academic Press, 1989-08-11. Hardcover. New. New. In shrink wrap. Looks like an interesting title!
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